Back MODEL IBS/e
Ion Beam Sputter Deposition and Etching System
 
IBSe Ion Bean Sputter

The Model IBS/e is a high vacuum thin film deposition system designed to precisely deposit sub-nanometer grain, conductive coatings onto specimens prior to examination in the electron microscope. Thin, conductive films are deposited onto specimens to prevent charging effects and to enhance contrast. Thin films are deposited using two ion beam sources directed at a target material, eliminating radiation or heating effects common with other coating techniques. Extremely thin, continuous metal or carbon films are deposited without risking damage to delicate features present on the specimen. Virtually any target material can be used for ion beam deposition with precise control over the deposition thickness. An optional third ion source allows specialized ion beam etching techniques to be employed. The ability to deposit amorphous, continuous films makes the IBS/e system ideal for high resolution electron microscopy techniques.
[Read brochure...]       [Click Link to see Standard IBS/e Configurations with images]

Model IBS/e Ion Beam Sputter Deposition and Etching System - Table Top Request Quote
Input quantity and click submit at the bottom
Optional Accessories Item # Price Enter Qty.
Etching Ion Source (mounted in item IBS/e when purchased) 02-06030-01 Request Quote Qty.
Replacement Source Anode Assembly 02-06148-01 Request Quote Qty.
Large Area Stage (4 in. [100mm]) 02-06108-01 Request Quote Qty.
     
Input quantity and click submit at the bottom
Specimen Carriers Item # Price Enter Qty.
Standard specimen carrier (1.25 in. diameter platform carrier) 01-06076-01 125.00 Qty.
Standard specimen carrier (2 in. diameter platform carrier) 01-06131-02 85.00 Qty.
1/8" diameter pin specimen carrier, 1.25 in. diameter 01-06078-01 200.00 Qty.
4 position, 10mm stub diameter specimen carrier, 1.25 in. diameter 30.1110i 154.00 Qty.
3 position, 12mm stub diameter specimen carrier, 1.25 in. diameter 30.1120i 154.00 Qty.
Stub for Hitachi FESEM Specimen Mount 30.1130i 86.00 Qty.
Flat pinch specimen carrier, 1.30 in. diameter 02-06240-01 295.00 Qty.
Custom specimen carriers
 
Input quantity and click submit at the bottom
Targets- Precious metal and semi-precious metal targets are subject Item # Price Enter Qty.
to market fluctuations, other sputtering targets available upon request.      
Potassium Bromide Scintillator (for beam observation) 01-06142-01 Request Quote
Gold2 01-06172-01 Request Quote
Platinum 01-06170-01 Request Quote
Palladium2 30.2030i Request Quote
Gold / Palladium2 30.2040i Request Quote
Carbon 01-06146-01 Request Quote
Tantalum 01-06193-01 Request Quote
Tungsten 01-06191-01 Request Quote
Chromium 01-06148-01 Request Quote
Iridium 01-06144-01 Request Quote
SilverSuper 2 30.2100i Request Quote
Nickel Target 30.2110i Request Quote
Titanium Target 01-06195-01 Request Quote
2- Not recommented for high resolution imaging
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Input quantity and click submit at bottom
Retrofit Options Item # Price Enter
Qty.
Quartz Crystal Thickness Monitor 30.0310i Request Quote
SI O8 Ion Source (SiO8 Ion Source retrofits to a second sputtering or etching port. Needle valve, connecting Ar tue and SHV high voltage cable included).2 30.0410i Request Quote
SIO8/07 Ion Source Mating Flange SIO8/07 Request Quote
EIRT Stage for IBS/e 02-06015-01 Request Quote
EIRT Stage Controller for IBS/e 02-06016-01 Request Quote
Spare Parts      
SI O8 Source Spares Pack (6 sets)  Includes: 6 qty. Front Cathodes / 6 qty. Rear Cathodes / 36 qty. Calibrated ceramic insulators 02-80137-01 975.00 Qty.
Front shield for SI O8 Ion source 01-06047-01 400.00 Qty.
Rear shield for SI O8 Ion source 01-06048-01 350.00 Qty.
Anode for SI O8 Ion source 01-06049-01 495.00 Qty.
HV Conductor for SI O8 Ion source 01-06051-01 150.00 Qty.
Rear cathode for SI O8 Ion source 01-06057-01 35.00 Qty.
Front cathode for SI O8 Ion source 01-06058-01 35.00 Qty.
IBS chamber / eIRT O-ring set 30.3100i 41.00 Qty.
IBS/e Ion Source Alignment Tool 01-06113-01 95.00 Qty.
Calibrated Ceramic Insulators (6 qty.) 02-80136-01 95.00 Qty.
       
RP Mist Eliminator Cartridge 90.4000i 68.00 Qty.
High voltage cable (for Model IBS TM200) 02-06024-01 222.00 Qty.
Target blanks (Al) 01-06028-01 30.00 Qty.
Anode Assembly Exchange
Exchange Program (Old anode must be returned after receiving replacement).		 02-06148-01EX Request Quote Qty.
Crystal for thickness monitor, pkg. 1 01-06137-01 17.00 Qty.
Crystal for thickness monitor, pkg. 10 0676-010 150.00 Qty.
   
*****Hover over Application Number to see Title or Click Here for a Complete Listing
Application Notes: 91, 92,110, 123, 125
South Bay Technology is no longer accepting web site orders. On October 4th, 2017 Ted Pella, Inc. purchased the products of South Bay Technology. Ted Pella, Inc. is in the process of evaluating and transitioning the products of SBT, which will happen over a period of the next several months. Please contact sales@tedpella.com for inquiries as to the status of products you wish to order.
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