South Bay Technology, Inc. Model RIE2000/3000

MODEL RIE2000/3000 - Reactive Ion Etcher

The RIE 2000/3000 Reactive Ion Etcher is specifically designed for anisotropic etching of microelectronic devices. This R&D sized instrument is designed to simulate the operation of larger production instruments in process development and pilot production applications. The RIE 2000/3000 is a turbo pumped system capable of reaching a base pressure of less than 10-6 torr. This low base pressure provides a clean etch environment and highly anisotropic etch without undercutting by eliminating residual species within the chamber prior to starting the etch process. The RIE-2000 model include as standard a two channel precision needle valve gas control and separate vent to atmosphere line. In replacement of the needle valve set up, the RIE-2000 can be equipped with up to two mass flow controller channels for accurate ratio of two species. The RIE-3000 can be equipped with up to five mass flow controller channels and in this case, the MFC controls are mounted into a stand alone cabinet connected to the main system. The RIE-3000 can ratio four process gas species to one species, if needed, or control the flows of each species independently. The rotational speed of the turbo pump can be controlled in order to set a precise pressure with the set mass flows.
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Model RIE2000 and RIE3000 - Reactive Ion Etcher Includes everything necessary to operate	Request Quote
Included Parts	Model RIE2000/3000
200 watt RF Generator and manual matching network Dual digital readout of forward and reflected power Dual gas controls - (only on RIE2000) Separate vent control Stainless Steel Chamber DC bias meter display Digital termination timer 6” water cooled sample stage Turbo pump Corrosive series rotary vane roughing pump Capacitance manometer Stainless steel gas distribution ring Instruction manual Quad Channel Power Supply/Readout (only on RIE3000) Mass Flow Controller (only on RIE3000) 1 -year warranty.

Input quantity and click submit below
RIE 2000 and 3000 - Accessories	Model #	Price	Enter Qty.
Quartz Chamber, 8" OD x 5" high	RIE2000-001		Qty.
RF Shield for Quartz Chamber	RIE2000-002		Qty.
Stainless Steel Chamber with Viewport	RIE2000-003	Click here for cost
Oil free Diaphragm Pump to Back Turbo Pump (in place of rotary vane pump)	RIE2000-004	Click here for cost
One Mass Flow Controller with Single Channel Power Supply/Readout	RIE2000-005		Qty.
Two Mass Flow Controllers with Quad Channel Power Supply/Readout	RIE2000-006		Qty.
Cold Cathode Gauge for accurate reading of base pressure (requires stainless steel chamber RIE2000-003)	RIE2000-008		Qty.
Mass Flow Controller	0550-014		Qty.
Single Channel Power Supply/Readout	0550-020		Qty.
Quad Channel Power Supply/Readout	0550-010		Qty.

South Bay Technology is no longer accepting web site orders. On October 4th, 2017 Ted Pella, Inc. purchased the products of South Bay Technology. Ted Pella, Inc. is in the process of evaluating and transitioning the products of SBT, which will happen over a period of the next several months. Please contact sales@tedpella.com for inquiries as to the status of products you wish to order.

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Application Notes: #85