South Bay Technology offers several tools to facilitate the processing,
evaluation, de-processing, and failure analysis of microelectronic devices.
We have plasma processing equipment for cleaning, surface treatment, and
isotropic and anisotropic reactive gas etching. Our parallel lapping tools
are perfect for de-layering applications.
Click on any of the links below for product information, to see an image
and/or to Request a Quote.
Chemical Processing
Model #
550 - Jet Thinning Instrument for TEM samples
160 - Chemical Polishing Fixture
550SE - Single Vertical Jet Electropolisher (Selective
Etch)
Mechanical Processing
575 - Backside Emission Analysis Preparation System
BEAPS
590 - Tripod Polisher®
595 - Bipod Polisher™
LP1 - Link to Lapping Fixtures
Plasma Processing
PC2000 - Plasma Cleaner
PE2000 - Plasma Etcher
RIE2000/3000 - Reactive Ion Etcher