The polishing of semiconductor materials
often requires the use of harsh chemicals such as bromine or hydroflouric
acid solutions that would corrode the stainless steel from which most of
the SBT fixtures are constructed. A special fixture for satisfying this
requirement has been developed. The Model 160 is made of TeflonŽ and is
designed to hold crystal wafers up to 2 1/8" diameter while they are being
polished with very corrosive chemicals. The sample is held in place by vacuum
and the sample is polished by rubbing the exposed sample against a suitable
polishing cloth soaked with the chemical solution. The Model 160 is ideal
for damage free polishing of semiconductor materials with harsh chemicals
and has been used extensively for polishing GaAs with bromine-methanol solutions.[Read
brochure...]
Related Products: 550DC Single Vertical
Jet Electropolisher, 550SE Single Vertical Jet Electropolisher,
Model 180 Lapping Tray