In most materials preparation laboratories,
lapping and polishing of materials is necessary for both process control
and specimen analysis. South Bay Technology has developed a series of
lapping and polishing fixtures designed to accurately grind and polish
specimens for these purposes. The vacuum chuck polishing fixtures are
a series of unique fixtures designed for ultra precise lapping of wafers
up to 8" in diameter. A micrometer type adjustment is used to set the
amount of material to be removed during lapping. The micrometer has 5
micron graduations and can easily be read within 1 micron. A digital dial
gauge, with 1 micron resolution is included to continuously monitor sample
thickness. While the most convenient and precise method for sample mounting
is to use the customized vacuum mounting plates, the fixtures are also
configured for more traditional wax mounting.
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